The 2 degrees of freedom positioning stage XY-13-OL is an option of the standard platform base. It enables to moves large samples over distances of several millimeters with a nanometer resolution of positioning. Like the miBot nanomanipulators, the XY-13-OL stage is teleoperated by the user within the same interface, making it very intuitive to control.
This option extends the capabilities of Imina Technologies manipulation platforms by enabling repetitive operations to be performed faster and easier. In fact, as soon as the miBot manipulators have been positioned on a sample, only the sample can then be moved by the XY stage, avoiding the need to reposition the manipulators at another location. Moreover, Matlab® based scripts allows to carry out semi-automatic operations such as wafer probing (watch the video above).
Degrees of freedom
2 (XY)
Range of motion
13 x 13 mm
Resolution of positioning
50 nm
Positioning error
± 0.05° (axes orthogonality)
± 9 µm (z axis over all the workspace)
Travelling speed
< 2.5 mm/s
Max. load
500 g
Axial force
< 50 g
Vacuum compatibility
< 10-6 mbar