The Imina Technologies packages PN15-4B-V and PL16-4B-V are unique solutions for nanomanipulation and characterization of electrical devices and advanced materials at the nanometer scale.
The solutions embed four miBot™ —our famously easy-to-use and versatile piezoactuated micro robots— allowing you to independently position the probes over millimeter scale samples with a resolution down to the nanometer. The 4 degrees of freedom of these nanoprobers enables the operator to easily adjust the orientation of probes in situ during experiment.
Specifically designed for low current measurements, leakage currents can be as low as 100 fA/V. Electrical characterization of nanostructures can be carried out with third party source-meter units (SMU) and signal analyzers through the shielded cabling, featuring an excellent signal-to-noise ratio.
A set of adapters is provided with the packages and enables to retrofit virtually any SEM, even those with small chamber. In fact, with a diameter of only 10 cm and a flat design, the circular robot platform gets either directly mounted on the SEM sample translation stage (PN15), or is interfaced on the SEM load-lock (airlock) mechanism (PL16).
While the installation and removal of the stage mounted version (PN15) only takes a few minutes and doesn’t require to permanently modify the chamber of your microscope, the load-lock compatible version (PL16) provides the highest throughput to exchange the device under test and the probe tips by avoiding the need to open the chamber.
An aperture centered on the robot platform fits various types of SEM stubs, letting you observe the specimen just like you are used to.