Take full advantage of the ultra-small size of the miBot™ —our famously easy-to-use and versatile piezoactuated micro robots— with platforms specifically designed to minimize their footprint on cluttered experimental setups and confined environmental chambers.
The whole system features up to four manipulators allowing you to independently position the probes and sensors over millimeters with a resolution down to a few tenth of nanometers.
Available in various shapes and dimensions, the compact stages accommodate 1 or up to 4 miBots. Like the manipulator, their dimensions are kept to the minimum by not having any electronic function and only serving the purpose of providing an motion arena to the mobile robot.
They are designed to be easily mounted on standard optical breadboards and microscope stages with screws and clamps. It is thus very quick to reconfigure your setup to adapt a new experiment.
The Compact packages are ideally suited for use at low optical working distance. They are also well adapted to contact large substrates mounted on sample holders that are moved by a positioning stage (e.g. wafer chucks, Petri dishes).
If you do not already have a microscope where to install the manipulators or perhaps you are interested in getting a complete solution with optics, sample stage, wafer chuck and other third party accessories, we can help you.
As an example, our latest integration was made for electrical measurements at the wafer-level. This unique solution provides both flexibility and automation capabilities to achieve fast and reliable testing of ICs and MEMS. Designed for wafers up to 6”, this probe station accommodates up to 8 independent probers, a motorized XYZ wafer stage, optics with coaxial illumination and digital camera. All components are controlled from a unified software application making it easy to move the wafer to specific locations, program test routines, and collect the data.
This video illustrates an automated sequence in which two miBot are operated to electrically contact micron size pads. The process is configured and run from Precio™, Imina Technologies' software suite.